Generation of surface plasmon resonance and lossy mode resonance by thermal treatment of ITO thin-films

I. Del Villar, C. R. Zamarreño, M. Hernaez, P. Sanchez, F. J. Arregui, I. R. Matias

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)


Silicon wafers coated with Indium Tin Oxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalOptics and Laser Technology
Early online date23 Dec 2014
Publication statusPublished - 1 Jun 2015


  • Optical resonance
  • Sensors
  • Thin films

Cite this