High efficient polishing of sliced 4H-SiC (0001) by molten KOH etching

Yi Zhang, Hongyingnan Chen, Dianzi Liu, Hui Deng

Research output: Contribution to journal › Article › peer-review

36 Citations (SciVal)

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- Last Name(descending)

Dianzi Liu
- Dianzi.Liuuea.acuk
- School of Engineering, Mathematics and Physics - Associate Professor in Solid Mechanics & Structural Optimization
- Materials, Manufacturing & Process Modelling - Member
- Sustainable Energy - Member
Person: Research Group Member, Academic, Teaching & Research