TY - JOUR
T1 - Low resistivity p-type Zn1-xAlxO
T2 - Cu2O composite transparent conducting oxide thin film fabricated by sol-gel method
AU - Hui, K. N.
AU - Hui, K. S.
AU - Li, Lei
AU - Cho, Y. R.
AU - Singh, Jai
PY - 2013/1
Y1 - 2013/1
N2 - Highly transparent Cu2O-doped p-type Zn1-xAl xO (AZO; Al/Zn = 1.5 at%) conducting oxide films were synthesized on glass substrates using a cost effective low temperature sol-gel method. X-ray diffraction of the Cu2O-doped AZO (AZO:Cu2O) films revealed a polycrystalline Cu2O (1 1 0) peak. The I-V measurements of the p-n junction (ITO/AZO:Cu2O) revealed rectifying I-V characteristics, showing that these AZO:Cu2O films exhibit p-type conductivity. p-Type conductivity was achieved by annealing the AZO:Cu 2O films in N2/H2 forming gas at 400 °C. The hole concentration, hole mobility and resistivity of the 0.5-2 mol% AZO:Cu2O films were 5.41 × 1018 to 1.99 × 1020 cm-3, 8.36-21.6 cm2/V s and 1.66 × 10-2 to 6.94 × 10-3 Ω cm, respectively. These results show that post-annealing in a forming gas is effective and practicable in producing p-type AZO.
AB - Highly transparent Cu2O-doped p-type Zn1-xAl xO (AZO; Al/Zn = 1.5 at%) conducting oxide films were synthesized on glass substrates using a cost effective low temperature sol-gel method. X-ray diffraction of the Cu2O-doped AZO (AZO:Cu2O) films revealed a polycrystalline Cu2O (1 1 0) peak. The I-V measurements of the p-n junction (ITO/AZO:Cu2O) revealed rectifying I-V characteristics, showing that these AZO:Cu2O films exhibit p-type conductivity. p-Type conductivity was achieved by annealing the AZO:Cu 2O films in N2/H2 forming gas at 400 °C. The hole concentration, hole mobility and resistivity of the 0.5-2 mol% AZO:Cu2O films were 5.41 × 1018 to 1.99 × 1020 cm-3, 8.36-21.6 cm2/V s and 1.66 × 10-2 to 6.94 × 10-3 Ω cm, respectively. These results show that post-annealing in a forming gas is effective and practicable in producing p-type AZO.
KW - A. Semiconductors
KW - A. Thin films
KW - B. Chemical synthesis
KW - D. Electrical properties
KW - D. Optical properties
UR - http://www.scopus.com/inward/record.url?scp=84869499641&partnerID=8YFLogxK
U2 - 10.1016/j.materresbull.2012.10.013
DO - 10.1016/j.materresbull.2012.10.013
M3 - Article
AN - SCOPUS:84869499641
VL - 48
SP - 96
EP - 100
JO - Materials Research Bulletin
JF - Materials Research Bulletin
SN - 0025-5408
IS - 1
ER -