Synthesis and properties of crystalline TiO2 films deposited by a HIPIMS+ technique

Q. M. Wang, Se-Hun Kwon, Kwun Nam Hui, Doo-In Kim, Kwan San Hui, Kwang Ho Kim

Research output: Contribution to journalArticlepeer-review

26 Citations (Scopus)

Abstract

Crystalline TiO 2 thin films were synthesized on the Si and glass substrates by reactive sputtering in a HIPIMS coating system. The films with a bit oxygen deficiency were deposited on the Si and glass substrates at oxygen flux rate of 10 sccm. The phase structure of the films changed with varying the parameters the MPP power pulse, the bias voltage, and working gas pressure. Anatase-dominant, anatase-rutile, and rutile films can be obtained by controlling the deposition parameters. The anatase-dominant and anatase-rutile TiO 2 films possess good photoinduced hydrophilicity and photocatalytic properties. The rutile films exhibited high dielectric constant. The related mechanism and potential application was discussed.

Original languageEnglish
Pages (from-to)90-95
Number of pages6
JournalVacuum
Volume89
Early online date3 Dec 2011
DOIs
Publication statusPublished - Mar 2013

Keywords

  • Dielectric constant
  • High power impulse magnetron sputtering
  • Phase structure
  • Photocatalytic properties
  • TiO2 film

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